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Crucial Issues in Semiconductor Materials and Processing Technologies Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991 by S. Coffa

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Published by Springer Netherlands in Dordrecht .
Written in English


Book details:

About the Edition

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

Edition Notes

Other titlesProceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, July 1-13, 1991
Statementedited by S. Coffa, F. Priolo, E. Rimini, J.M. Poate
SeriesNATO ASI Science, Series E: Applied Sciences, 0168-132X -- 222, NATO ASI Science, Series E: Applied Sciences -- 222.
ContributionsPriolo, F., Rimini, E., Poate, J. M.
The Physical Object
Format[electronic resource] :
Pagination1 online resource (564 pages 51 illustrations).
Number of Pages564
ID Numbers
Open LibraryOL27028165M
ISBN 10940112714X
ISBN 109789401127141
OCLC/WorldCa840309570

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Crucial Issues in Semiconductor Materials and Processing Technologies (Nato Science Series E: (Closed)) [Coffa, S.] on *FREE* shipping on qualifying offers. Crucial Issues in Semiconductor Materials and Processing Technologies (Nato Science Series E: (Closed)) › Books › Engineering & Transportation › Engineering. Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials Crucial Issues in Semiconductor Materials and Processing Technologies: Coffa, S, Priolo, F, Rimini, Emanuele, Poate, J M: : Libros Crucial issues in semiconductor materials and processing technologies edited by S. Coffa [et al.] (NATO ASI series, Series E. Applied sciences ; vol. ) Kluwer Academic Publishers, c

Crucial Issues in Semiconductor Materials and Processing Technologies. Surface Science and Semiconductor Processing. In: Coffa S., Priolo F., Rimini E., Poate J.M. (eds) Crucial Issues in Semiconductor Materials and Processing Technologies. NATO ASI Series (Series E: Applied Sciences), vol Buy this book on publisher's site Growth of semiconductor materials; Physical chemistry of semiconductor materials processing; With applications across all solid state technologies,the book is useful for advanced students and researchers in materials science, physics, chemistry, electrical and electronic engineering. It is also useful for those in the semiconductor :// The book further examines reliability issues in these materials and puts forward perspectives of integrating them with 2D materials for novel high-frequency and high-power devices. In summary, it covers nitride semiconductor technology from materials Semiconductor processing involves several process fluids and gases, especially in lithography, film/metal deposition, etching, and cleaning steps. This important book summarises recent research on basic principles, new materials and emerging technologies in this essential

ISBN: OCLC Number: Notes: "Published in cooperation with NATO Scientific Affairs Division." "Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, July "--Title page :// 2 days ago  Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.. Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse   Get this from a library! Crucial Issues in Semiconductor Materials and Processing Technologies: Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy July [S Coffa;] -- Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth :// Klappentext zu „Crucial Issues in Semiconductor Materials and Processing Technologies “ Semiconductors lie at the heart of some of the most important industries and technologies